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Slit Valve TM-PM

Used between transfer chambers and reaction chambers in etching, PVD, CVD, etc.

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Slit Valve TM-PM
Slit Valve TM-PM
  • Product Features
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Product Features

L-motion

L-motion

Proprietary Intellectual Property

Zero Vibration

Zero Vibration

Stable motion, frictionless

Related Solutions

Vacuum Slit Valve - High Vacuum Design and Manufacturing Solutions

Vacuum Slit Valve - High Vacuum Design and Manufacturing Solutions

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